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1. XML Task Plan Language via XML for Microassembly Robot ABSTRACT Micro robotic technology is an important branch of MEMS (Micro Electro Mechanical System), as well as a hot spot in robotics.

2. Moreover, characteristics of microassembly, the techniques of micro-vision, multi-sensor data fusing, and micro-gripper are analyzed.

3. Microassembly technology is increasingly required with the rapid development of microele- tromechanical system (MEMS) .

4. The productivity of the flexible microassembly system is validated by further experiment.

5. The development trends of the microassembly robot and the microassembly techniques in the future are discussed.

6. In this paper, the current situation of the microassembly robot and key techniques for micromanipulation is presented, and some corresponding application cases in different fields are introduced.

7. Moreover research experiments about the microassembly of capillary and microfluidic chip were done, which have proved that the assembly assignment can be finished successfully.

8. Then, the latest research progresses of traditional microassembly technology and emerging self-assembly technology are introduced, where some key technical problems are discussed briefly.

9. Automatic microassembly system is the key equipment to realize the assembly of miniature function device and interface device.

10. Batch microassembly of MEMS sensors is limited by the manual manipulation required specially trained technicians.

11. His current research focuses on agent-based microassembly of electromechanical products, human-computer interaction through the sense of touch, and dynamically stable mobile robots.

12. As one of the common frontier technology of IC manufacturing, micro-manufacturing, and robot manipulation, microassembly and micromanipulation have been researched widely recently.

13. To reduce the production costs and simultaneously obtain high production quality, a flexible microassembly system for automated anodic bonding of MEMS sensors is developed.

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14. In this paper, a novel imaging technique is proposed. This technique tracks 3D coordinates of micro-object for micromanipulation and microassembly using a single optical microscope.

15. A semi-autonomous control scheme with human-robot interaction was utilized in microassembly operations.

16. Lastly, the paper concludes with some open problems and future trends of microassembly.

17. Our results on experimentation and simulation show that virtual microassembly approach helps to avoid the defocus problem under the microscope and also to make the operation feasible and easier.